USE | Product name | Base oil | Operating temperature range (℃) | Features | Application | Content・Package |
High vacuum | NOXLUB | Fluorine oil | -50~260 | Fluorine grease with low vapor pressure and extremely low oil evaporation even under high vacuum. | Bearings and sliding parts for semiconductor manufacturing equipment, vacuum equipment, vacuum pumps, clean rooms, etc. Various seals such as oil seals and O-rings. | 75g |