OPERATING TEMPERATURE RANGE
Low vapor pressure, the very little oil evaporation even under high vacuum.
Excellent heat resistance and oxidation resistance.
Does not react or dissolve in most chemicals, solvents and fuels.
Has little adverse effect on most rubber and plastics.
Bearings and sliding parts for semiconductor manufacturing equipment, vacuum equipment, vacuum pumps, clean rooms, etc.
Various seals, such as oil seals and O-rings.