OPERATIONG TEMPERATUER RANGE
The vapor pressure is low, and oil evaporation is extremely small even under high vacuum.
Has excellent heat resistance and oxidation resistance. Does not react or dissolve in most chemicals, solvents and fuels.
Does not adversely affect most rubbers and plastics.
Bearings and sliding parts for semiconductor manufacturing equipment, vacuum equipment, vacuum pumps, clean rooms, etc.
Various seals such as oil seals and O-rings.